PANKRATOV, Evgeny L. On Preliminary Processing of Substrate to Decrease of Mismatch-Induced Stresses in a Heterostructure. Karshi Multidisciplinary International Scientific Journal, [S. l.], v. 3, n. 2, p. 78–105, 2026. DOI: 10.22105/kmisj.v2i1.122. Disponível em: https://kmisj.reapress.com/journal/article/view/122.. Acesso em: 20 aug. 2026.